Evolution of surface roughness and mechanical properties of Sputtered Aluminum thin films

Author:

Mwema F.M.,Akinlabi E.T.,Oladijo O.P.

Abstract

Abstract In this work, aluminum thin films were sputtered on steel substrates at a varying substrate temperature ranging between 40 and 100 degrees Celsius. The films were characterized for microstructure by field emission scanning electron microscope, topography by atomic force microscope, mechanical properties by nanoindentation and the results related to the wear behavior of the films under very high sliding load of 30 N. The mechanism of failure of such films were observed and the relationship between the substrate temperature and sliding failure discussed. The study is important in understanding the failure mechanisms and improvement of the surface properties of sputtered aluminum thin films.

Publisher

IOP Publishing

Subject

General Physics and Astronomy

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