Fabrication of 700V SiC-SIT with Ultra-Low On-Resistance of 1.01mΩ•cm2

Abstract

Silicon carbide static induction transistors with submicron buried p+ gate (SiC-BGSITs) have been successfully developed through innovative fabrication process. A submicron buried p+ gate structure was fabricated by the combination of submicron trench dry etching and epitaxial growth process on a trench structure. As the device performance is mainly determined by the width of the p+ gate region and the spacing between two adjacent p+ gate regions, corresponding to the width of n- channel, we have optimized these parameters carefully using a device simulator. The breakdown voltage VBR and specific on-resistance RonS of the fabricated BGSIT were 700 V at a gate voltage VG = –12 V and 1.01 m/·cm2 at VG = 2.5 V and a drain current density JD = 200 A/cm2, respectively. This RonS is the lowest on-resistance for ~ 600V class power switching devices, including other wide-bandgap materials such as GaN.