AFM Fast Tip Approach Based on Fiber Optic Sensor

Abstract

As AFM tip approach speed is one of the key factors for AFM industrial on-line detection application, a sectional fast tip approach method composed of rough approach and mild approach processes is introduced here. In rough approach process, AFM tip can be approached by step motor to certain distance upon the sample surface with high speed, as a homemade dual-channel reflective intensity modulated fiber optic displacement sensor (DC-RIMFODS) can be integrated to AFM scan head easily to detect the stop position. While continued with mild approach process after rough approach, step motor can run slowly with a common PI feedback controller for Z scanner to make the tip get in touch with sample surface softly. Experimental results show that with the well-defined fiber optical sensor positioning accuracy and repeatability, the tip-sample distance can be limited in certain range after rough approach with 1mm/s high speed, and the whole AFM tip approach process can be finished in 20s by continuing with mild approach, while the initial tip-sample distance is about 10mm.