Affiliation:
1. University of Yamanashi
Abstract
This paper demonstrates nanostructure formation performed by supercritical fluid chemical deposition. Pt was deposited through hydrogen reduction of a Pt chelate being dissolved in supercritical carbon dioxide. Pt was deposited conformally inside nanotrences, however Pt did not grow thick due to a very long incubation time for the nucleation. Interestingly, SFCD Pt grew thick on already-existing noble metals. A two-step SFCD process was employed, where a Pt seed layer was deposited first and Pt was grown thicker in the subsequent run. This enabled to fill Pt in nanotrenches and nanoholes.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science