Structure Design of Large Travel One-Arm Bridge Type Z-Axis Nano-Positioning Stage

Author:

Fan Wei1,Li Zhong Shen1,Jiang Shao Yin1

Affiliation:

1. Huaqiao University

Abstract

In some areas such as micro-mechanical, ultra-precision machining, nanotechnology, the high-precision positioning and very fine vertical scanning motion are needed urgently. Therefore, the Z-axis micro-displacement driving control technology has become the key technology in these areas. The piezoelectric ceramics actuator and stepper motor were integrated into hybrid linear actuator in Z-axis nanopositioning stage, and this can simplify the structure of the drive system. By calculating the gravity center of the vertical scanning system, and using single counterweight, a new one-arm bridge type structure was built. Appropriate tension and current sensors were also equipped in order to real-time monitor the drive status. It is feasible to balance the weight with this simplified system structure, and also guarantee the driving control accuracy of nanopositioning stage. Besides, in the structural design, the Abbe error can be reduced greatly by placing the stage center, grating ruler and displacement measurement centerline on the same line with grating reading head. The driving travel of nanopositioning stage is 150mm, and driving resolution is 1nm. The designing method introduced gives a scientific method and practical reference for the development of z-axis driving control system.

Publisher

Trans Tech Publications, Ltd.

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号  京ICP备18003416号-3