A high fill-factor comb-driven XY-stage with topological layer switch architecture-Reference-Cited by-同舟云学术

A high fill-factor comb-driven XY-stage with topological layer switch architecture

Published:2006 Issue:9 Volume:3 Page:197-202
ISSN:1349-2543
Container-title:IEICE Electronics Express
language:en
Short-container-title:IEICE Electron. Express

Author:

Takahashi Kazuhiro¹²,Mita Makoto³,Fujita Hiroyuki¹,Toshiyoshi Hiroshi¹²

Affiliation:

1. Institute of Industrial Science, University of Tokyo

2. Kanagawa Academy of Science and Technology

3. Japan Aerospace Exploration Agency

Publisher

Institute of Electronics, Information and Communications Engineers (IEICE)

Subject

Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://www.jstage.jst.go.jp/article/elex/3/9/3_9_197/_pdf

Reference10 articles.

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2. [2] S. Kwon and L. P. Lee, “Stacked Two Dimensional Micro-Lens Scanner for Micro Confocal Imaging Array, ”The 15th IEEE Int. Conf. Micro Electro Mech. Syst. (MEMS 2002), Las Vegas, Nevada, USA, pp. 483-486, Jan. 20-24, 2002.

3. A two-dimensional f-.THETA. micro optical lens scanner with electrostatic comb-drive XY-stage

4. [4] H. N. Kwon, J. H. Lee, K. Takahashi, and H. Toshiyoshi, “Optical characterization of 9 × 9 optical cross connect utilizing silicon lens scanners with spider-leg actuators, ”Proc. SPIE Photonics West, MOEMS-MEMS 2006, SPIE vol. #6114, San Jose, CA, USA, Jan. 25-26, 2006.

5. Silicon micro XY-stage with a large area shuttle and no-etching holes for SPM-based data storage

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