Author:
Muralidhara ,Rao Rathnamala
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials
Reference22 articles.
1. E. Eleftheriou, P. Bachtold, G. Cherubini, A. Dholakia, C. Hagleitner, T. Loeliger, A. Pantazi and H. Pozidis, A nanotechnology-based Approach to data storage, Proc. of the 29 th VLDB Conference (2003) 3–7.
2. M. S. Faizul, T. Ono, Y. Kawai and M. Esashi, A Si-PZT hybrid XY-microstage utilizing an actuator amplification mechanism, Proc. of the Actuator 2008 (2008) 75–78.
3. H. Debeda, T. V. Freyholf, J. Mohr, U. Walrabe and J. Wengelink, Development of miniaturized piezoelectric actuators for optical applications realized using LIGAchthrth technology, IEEE Journal of MEMS, 8 (1999) 258–263.
4. S. Aphale, A. J. Fleming and S. D. R. Moheimani, High speed nano-scale positioning using piezoelectric tube actuator with active shunt control, Micro and Nano Letters, 2 (1) (2007) 9–12.
5. T. Takahashi, M. Mita, H. Fujita and H. Toshiyoshi, A high fill-factor comb-driven XY-stage with topological layer switch architecture, IEICE Electronic Express, 3 (2006) 197–202.
Cited by
8 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献