Parallel-kinematics XYZ MEMS part 1: Kinematics and design for fabrication
Author:
Funder
National Science Foundation
Publisher
Elsevier BV
Subject
General Engineering
Reference32 articles.
1. Development of three-dimensional electrostatic stages for scanning probe microscope;Ando;Sens. Actuators A,2004
2. Bonev, I., 2001. Delta Parallel Robot — the Story of Success. Available at: http://www.parallemic.org/Reviews/Review002.html.
3. A novel parallel-kinematics mechanisms for integrated, multi-axis nanopositioning. Part 1. Kinematics and design for fabrication;Dong;Precis. Eng.,2008
4. A novel parallel-kinematics mechanism for integrated, multi-axis nanopositioning. Part 2: dynamics, control and performance analysis;Dong;Precis. Eng.,2008
5. Electrostatically actuated cantilever with SOI-MEMS parallel kinematic XY stage;Dong;J. Microelectromech. Syst.,2009
Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Design and control of an x-y-θz parallel piezoelectric nanopositioning stage with a large moving platform;Journal of Intelligent Material Systems and Structures;2022-07-01
2. Beyond pull-in angle control of a dual axis torsional micro-actuator considering bending effects;Applied Mathematical Modelling;2022-07
3. Atomic Simulations of Packing Structures, Local Stress and Mechanical Properties for One Silicon Lattice with Single Vacancy on Heating;Materials;2021-06-07
4. Design and simulation analysis of an integrated xyz micro-actuator for controlling displacement of a scanning probe;Journal of Theoretical and Applied Mechanics;2020-12-08
5. Dynamics modeling and verification of a large-displacement precision preloaded-flexure stage;Journal of Manufacturing Processes;2019-07
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3