Dynamic responses of a precision positioning table impacted by a soft-mounted piezoelectric actuator
Author:
Publisher
Elsevier BV
Subject
General Engineering
Reference23 articles.
1. Flexure hinges for piezoactuator displacement amplifiers-flexibility, accuracy, and stress considerations;Xu;Prec. Eng.,1996
2. Smith S. Flexures: elements of elastic mechanisms. Taylor and Francis; 2000.
3. Piezoelectric actuator for scanning tunneling microscopy;Okayama;Jpn. J. Appl. Phys.,1985
4. Piezodriven 50-μm range stage with subnanometer resolution;Scire;Rev. Sci. Instrum.,1978
5. An ultra-precision XYΘZ Piezo-micropositioner—Part I: design and analysis;Chang;IEEE Trans. Ultrasonic Ferroelectrics Frequency Control,1999
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