Affiliation:
1. National Research University of Electronic Technology
Abstract
The usage possibility of conformal flexible boards for angular velocity sensors has been described. Production of such sensors allows us to solve the problem of constructing roll sensor for rapidly rotating body (20 Hz) along the longitudinal axis of which are speed reaching 200g, and also perpendicular speed up 20g. The paper also analyzed the possibility of using polyparaxylylene as dielectric and protective layer in conformal multilayer wiring boards (CMWB). Research tests for compliance with the requirements of the developed process conducted and research testing to the requirements of the developed technological process. The proposed approach has been developed and its efficiency has been demonstrated by various experimental scenarios.
Publisher
Trans Tech Publications, Ltd.
Reference3 articles.
1. D. Sparks et al. Angular rate sensor and accelerometer combined on the same micro-machined CMOS chip, Microsystem tech., Vol. 14 (2008), p.139.
2. S.P. Timoshenkov, A.N. Boyko, B.M. Simonov "Parameter estimation technique for sensitive elements of micro-accelerometers and micro-mirrors, Semiconductors, Vol. 42, No13 (2008), p.1564.
3. S.P. Timoshenko, V.V. Kalugin, S.A. Anchutin, Y.S. Morozov, in: Micro-electromechanical Systems. Moscow, MIET (2009), pp.3-22.
Cited by
3 articles.
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