1. V. Varadan, K. Vinoĭ, and K. Dzhoze, High Frequency MEMS and their Applications (Tekhnosfera, Moscow, 2004) [in Russian].
2. J. Melin, Micromech. Microeng., No. 10, 209 (2000).
3. A. B. Kaplun, E. M. Morozov, and M. A. Olfer’eva, ANSYS in an Engineer’s Hands: Practical Instruction (Editorial URSS, Moscow, 2003) [in Russian].
4. J. J. Blech, J. Lubr. Technol. 105, 615 (1983).
5. W. S. Griffin et al., J. Basic Eng. 3, 451 (1966).