Development of Controlled Micro-Mirrors with Large Rotation Angle

Abstract

Development of micro-mechanical sensors and systems based on them is one of the development branches in microelectronic technology and labeled as one of the technologies of the 21-st century. The relevance and significance of the paper related to the methodology creation for the development and manufacture of micro-mirror with large rotation angle. Methodology was based on an integrated approach to solving such problems as the processes of surface preparation, etching of the complex profile surfaces, matching the silicon structures, etc. which allows to create MOEMS elements.