Research and development of capacitive transducer with linear acceleration

Author:

Korobova Natalia,Kochurina Elena,Timoshenkov Sergey,Chaplygin Yuriy,Anchutin Stepan,Kosolapov Andrey

Publisher

SPIE

Reference9 articles.

1. Nanotechnology in Electronics/;Yu.,2013

2. Korobova, N., Razzhivalov, P., Kalugin, V., Timoshenkov, S., and Artemov, E. “Error angle determination of the star sensor with liquid cooling”. SPIE Optical Engineering +Application. 2014. Photonic Fiber and Crystal Devices: Advances Materials and Innovations in Device Applicattions VIII. Ed. Shizhuo Yin, Ruyan Guo, Proc.of SPIE. Vol.9200, 920001.

3. Angular rate sensors with conformal flexible multilayer polymer wiring boards;Korobova,2013

4. Nano and Microsystem Technology. From research to development/;Maltsev,2005

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