Affiliation:
1. Nanjing University of Aeronautics and Astronautics
2. Nantong University
Abstract
The self-conditioning of hydrophilic fixed abrasive lapping based on the principle of two-body (pad-wafer) abrasion has great importance on the MRR (material removal rate) of wafer. The physical and mechanical properties of pad were taken as set of available alternatives. Fuzzy comprehensive evaluation principle was applied to establish a model for the self-conditioning of FAP. The swelling ratio, the slurry abrasive ratio and pendulum hardness were selected to be the set of alternatives for self-conditioning evaluations in this paper .The five types of matrix formations of fixed-abrasive pad were prepared, and the matrix were ranked in order of comprehensive evaluation index. The results show that the fuzzy evaluation is rational. The tests of MRR verified the self-conditioning of FAP. The machining of pad can be evaluated in advance of lapping processes. Moreover, the self-conditioning evaluation will be important reference for determination of FAP during choosing the matrix formations.
Publisher
Trans Tech Publications, Ltd.
Reference11 articles.
1. Hua Qian-feng,FANG Hai-sheng,YUAN Ju-long. Influencing Factors of Conditioning Effect about Polishing Pad Conditioning for Chemical Mechanical Polishing [J]. Light Industry Machinery, 27 (2009)48-51.
2. Seike Y, Lee HS, Takaoka M, et al.Development of a Pad Conditioning Process for Interlayer Dielectric CMP Using High-Pressure Micro Jet Technology [J]. Journal of the Electrochemical Society, 153(2006)223-228.
3. Kim H, Park B, Lee S, et al. Self-Conditioning Fixed Abrasive Pad in CMP [J]. Journal of Electrochemical Society, 151(2004)858-862.
4. Kim H, Jeong H, Seo H, et al.Self-conditioning of encapsulated abrasive pad in chemical mechanical polishing [J]. Journal of Materials Processing Technology, 142（2003） 614–618.
5. Choi JY, Jeong HD. A study on polishing of molds using hydrophilic fixed abrasive pad [J]. International Journal of Machine Tools & Manufacture, 44 (2004) 1163–1169.