Author:
Kim Hoyoun,Park Beumyoung,Lee Sangick,Jeong Haedo,Dornfeld David A.
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Reference11 articles.
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4. A Model of Chemical Mechanical Planarization of Patterned Wafers with Fixed Abrasives
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