Doping Level Dependence of Electrical Properties for p+n 4H-SiC Diode Formed by Al Ion Implantation

Abstract

Electrical properties of p+n 4H-SiC(0001) diode formed by Al ion implantation to n-type epitaxial layer have been investigated as a function of Al doping concentration ranging from 1 x 1020 to 6 x 1020 /cm3 and the operation temperature. The n-type 4H-SiC(0001) epitaxial layer with a net donor concentration of 1 x 1016 /cm3 are multiply implanted by Al ions in the energy range from 30 to 170 keV at elevated temperature of 500 oC with a implantation layer thickness of 350 nm, followed by the annealing at 1900 oC for 1min using EBAS. On-state resistance of diode with Al concentration of 1 x 1020 /cm3 is estimated to be about 4.5 mcm2, while that for diode with Al concentration of 6 x 1020 /cm3 is 1.8 mcm2 at 25 oC. In the sample with Al concentration of 6 x 1020 /cm3 shows the positive temperature coefficient of on-state resistance of diode, while that for sample with Al concentration less than 3 x 1020 /cm3 is negative. The diode formed by Al implantation at the concentration of 6 x 1020 /cm3 is able to operate at the constant current density of 80 A/cm2 at the bias of 2.9 V independent to operation temperature.