Study on the Surface Quality of LiNbO3 Wafer by CMP

Author:

Xing Tong1,Yuan Ju Long1,Li W.1,Ji Shi Ming1,Zhang L.B.1,Zhao Wen Hong1

Affiliation:

1. Zhejiang University of Technology

Publisher

Trans Tech Publications, Ltd.

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Reference12 articles.

1. Y.H. Xu: Material of Ferroelectricity and Piezoelectricity (Science Publishing Company, China 1978).

2. S.W. Freiman: Ceramic 1999 Program and Accomplishments (Material Science and Engineering Laboratory, NISTIR 6433, January 2000).

3. H. Hocheng, H.Y. Tsai and Y.L. Huang: Key Engineering Material Vol. 196 (2001), p.1.

4. R. Jairath, J. Farkas, C.K. Huang, et al: Solid State Technology Vol. 7 (1994), p.71.

5. J.M. Steigermald, S.P. Murarka and R.J. Gutmann: Chemical Mechanical Planarization of Microelectronic Materials (1996), p.324.

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