Ultraprecision Lapping for the Zirconia Ceramic Plane

Author:

Ji Hong Bo1,Peng Yan1,Zhou Fen Fen1,Guo Wei Gang1,Lv Bing Hai1,Zhao Ping1

Affiliation:

1. Zhejiang University of Technology

Abstract

Zirconia ceramic widely applied in the fields of electronics, instrumentations and mechanical manufacture for its good physical and chemical properties. The ultraprecision lapping technology for the Zirconia ceramic is studied in this paper, and the influence of the different lapping parameters such as slurry, load and lapping velocity on the surface roughness of Zirconia ceramic is discussed. The evolution of surface construction is observed with the microscope to analysis the material removal mechanism. An extremely smooth surface with roughness 6.55nm Ra is obtained in the ultraprecision process. It is also found that the gap in the material will limit improvement of surface roughness and a better surface roughness of 4.72nm Ra was observed when using more compactly material lapped by same method.

Publisher

Trans Tech Publications, Ltd.

Subject

General Engineering

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