Affiliation:
1. Osaka Electro-Communication University
2. National Institute of Advanced Industrial Science and Technology
3. National Institute of Advanced Industrial Science and Technology (AIST)
Abstract
The temperature dependencies of the resistivity and Hall coefficient for heavily Al-doped 4H-SiC epilayers with Al concentration (CAl) higher than 2×1019 cm-3 were investigated. The signs of measured Hall coefficients (RH) change from positive to negative at low temperatures. For the epilayers with CAl < 3×1019 cm-3 the sign inversion occurred in the hopping conduction region, which was reported to be explicable using the model for amorphous semiconductors. For the epilayers with CAl > 3×1019 cm-3, on the other hand, the sign inversion occurred in the band conduction region, which is a striking feature, because the movement of free holes in the valence band should make RH positive. The sign-inversion temperature increased with increasing CAl, while the dominant-conduction-mechanism-change temperature was almost independent of CAl.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
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