A Parameters Optimization of the CO2 Laser Drilling Process for HDI Microvia Fabrication

Author:

Hu You Zuo1,He Wei2,Xue Wei Dong1,Tao Zhi Hua1,Huang Yu Xing1,Xu Huan3,Lv Wen Qu3

Affiliation:

1. University of Electronic Science and Technology of China (UESTC)

2. University of Electronic Science and Technology of China

3. Bomin Electronic Co. Ltd.

Abstract

The blind via holes formation by laser drilling is one of the key technologies for demanding high density interconnect printed circuit boards. In this paper , the drilling conditions of drilling the blind via holes and the quality of the drilled holes are examined using a CO2 laser source against the FR4 board without copper foil.We chose laser energy,pulse shot,pulse width and diameter of beam as the experimental parameter . The results showed that laser energy and beam diameter played a more important role on changing the blind vias’ diameter than pulse shot and pulse width .While the pulse shot and pulse width take more important role in changing the depth of vias.

Publisher

Trans Tech Publications, Ltd.

Reference10 articles.

Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Improving Micro-hole Laser Drilling Performance Using an AOM;Journal of the Korean Society for Precision Engineering;2024-06-01

2. Micromachining of Al2O3 thin films via laser drilling and plasma etching for interfacing copper;Materials & Design;2021-11

3. Optics and Apparatus for CO2 and CO Laser Micro-processing;Handbook of Laser Micro- and Nano-Engineering;2021

4. Optics and Apparatus for CO2 and CO Laser Micro-processing;Handbook of Laser Micro- and Nano-Engineering;2020

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