Publisher
Trans Tech Publications, Ltd.
Subject
Condensed Matter Physics,General Materials Science,Atomic and Molecular Physics, and Optics
Cited by
3 articles.
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1. Three-dimensional depth profiles of boron ions implanted in SiO2;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2001-06
2. Ion implantation and diffusion of Al in a system;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1996-08
3. Kinetics of phosphorus proximity rapid thermal diffusion using spin‐on dopant source for shallow junctions fabrication;Journal of Applied Physics;1995-07