Tribo-Electrochemical Performance of Copper ECMP in Mixed Phosphate Electrolyte

Author:

Zhai Wen Jie1,Yang Yang Zhan1

Affiliation:

1. Harbin Institute of Technology

Abstract

A mixed phosphate slurry is screened out first in terms of inhibition efficiency of the inhibitor by electrochemical static-corrosion test of copper for different concentrations of H3PO4 and BTA. Then ECMP experiments are carried out on a modified pin-on-disk type tribo-electrochemical tester for the candidate slurry under the potential range of applied voltage, with the anodic current and friction coefficient recorded and MRR measured. It is found that copper ECMP can achieve good surface quality with a high MRR under 0.75 V anodic potential in slurry of 10%KH2PO4 + 5%H3PO4+0.03M BTA. Down force is found to have little effect on MRR in the mixed slurry, this pressure-independent characteristics may help reduce the pattern effect during patterned wafer polishing.

Publisher

Trans Tech Publications, Ltd.

Subject

General Engineering

Reference5 articles.

1. L. Ecomomikos, X. wang, A. Sakamoto, Proc. of the IEEE International Interconnect Technology Conference, 233(2004).

2. K. G. Shattack, A. C. West, J. Appl. Electrochem., DOI 10. 1007/s10800-009-9865-7(2009).

3. Yangzhan Yang, Dissertation for Master Degree, Harbin Institute of Technology, (2010).

4. W. J. Zhai, Y. Z. Yang, International Conference on Chemical Engineering and Advanced Materials, May 28-30th, 2011, Changsha, China. (to be published).

5. J. Y. Fang, P.W. Huang, M.S. Tsai, etal., Electochem. Solid-State Lett., 9(1) G13-G16 (2006).

Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号  京ICP备18003416号-3