Comprehensive Dynamic Model of a Viscously Damped RF-MEMS Switch Including Squeeze Film and Impact Force Effects-Reference-Cited by-同舟云学术

Comprehensive Dynamic Model of a Viscously Damped RF-MEMS Switch Including Squeeze Film and Impact Force Effects

Published:2013-08 Issue: Volume:389 Page:660-667
ISSN:1662-7482
Container-title:Applied Mechanics and Materials
language:
Short-container-title:AMM

Author:

H. El-Sinawi Ameen¹,A. Awad Omar¹,H. El-Sinawi Abdulaziz²

Affiliation:

1. American University of Sharjah

2. King Faisal University

Abstract

This work presents a new approach to modeling the dynamic behavior of a viscously damped RF-MEMS switch. The model takes into account the effect of squeeze film on resonance frequencies of the switch structure. It also presents a new approach to modeling the impact force as well as its effect on transient pull-in, and release dynamics of the perforated switch membrane. Simulation results of the proposed model are validated against experimental results of the same exact switch, and the comparison was impressive. Model results show that the model is able to capture the experimental behavior of the switch with less than 2% error.

Publisher

Trans Tech Publications, Ltd.

Link

https://www.scientific.net/AMM.389.660.pdf

Reference12 articles.

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