Pull-in-voltage and RF analysis of MEMS based high performance capacitive shunt switch-Reference-Cited by-同舟云学术

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Pull-in-voltage and RF analysis of MEMS based high performance capacitive shunt switch

Published:2018-07 Issue: Volume:77 Page:5-15
ISSN:0026-2692
Container-title:Microelectronics Journal
language:en
Short-container-title:Microelectronics Journal

Author:

Pertin Osor,Kurmendra ^ORCID

Publisher

Elsevier BV

Subject

General Engineering

Reference36 articles.

1. RF MEMS: Theory, Design, and Technology;Rebeiz,2003

2. RF MEMS and Their Application;Varadan,2003

3. Analysis of pull-in voltage of MEMS switches based on material properties and structural parameters;Arathy,2015

4. Methods for the minimization of actuation voltage in MEMS;Hora;Int. J. Eng. Res. Appl.,2014

5. Micromachined low-loss microwave switches;Yao;J. Microelectromech. Syst.,1999

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3. An Electromechanical and Radio Frequency Analysis of RF Mems Switch Using Staircase Shaped Spring for 5G Telecommunication;2023-08-21

4. High Frequency Capacitive RF MEMS Switch Using Dielectric Silicon Nitride for Wireless Telecommunication and 5G Applications;2022 13th International Conference on Computing Communication and Networking Technologies (ICCCNT);2022-10-03

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