Macromodel-based simulation and measurement of the dynamic pull-in of viscously damped RF-MEMS switches

Author:

Niessner Martin,Schrag Gabriele,Iannacci Jacopo,Wachutka Gerhard

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference40 articles.

1. RF MEMS;Rebeiz,2003

2. Micromachined low actuation voltage RF MEMS capacitive switches, technology and characterization;Rangra,2004

3. Controlling stress and stress gradient during the release process in gold suspended micro-structures;Mulloni;Sensors and Actuators A,2010

4. Experimentally validated and automatically generated multi-energy domain coupled model of a RF-MEMS switch;Niessner,2009

5. Hierarchical modeling approach for full-system design and control of microelectromechanical systems;Schrag,2008

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