Controlling stress and stress gradient during the release process in gold suspended micro-structures-Reference-Cited by-同舟云学术

Controlling stress and stress gradient during the release process in gold suspended micro-structures

Published:2010-07 Issue:1 Volume:162 Page:93-99
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Mulloni V.,Giacomozzi F.,Margesin B.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference10 articles.

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4. Dry etching of Cr2O3/Cr stacked film during resist ashing by oxygen plasma;Tonotani;Jpn. J. Appl. Phys.,2005

5. Realization of low-stress Au cantilever beams;Stanec;J. Micromech. Microeng.,2007

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