Deformation characteristics of electroplated MEMS cantilever beams released by plasma ashing-Reference-Cited by-同舟云学术

Deformation characteristics of electroplated MEMS cantilever beams released by plasma ashing

Published:2008-12 Issue:2 Volume:148 Page:407-415
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Kang T.J.,Kim J.G.,Kim J.H.,Hwang K.C.,Lee B.W.,Baek C.W.,Kim Y.K.,Kwon D.,Lee H.Y.,Kim Y.H.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

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