Effects of Bias on Optical and Chemical Bonding Properties of Germanium Carbon Films

Abstract

Amorphous hydrogenated Ge1-xCx films are prepared by radio frequency (RF) magnetron cosputtering using Ge/graphite composite target and their composition, optical and chemical bonding properties as a function of bias have been investigated. The results show a decrease in the deposition rate with increasing bias, and the optical gap nearly keep constant due to effects of both composition and chemical bonding. Through the analysis of X-ray photoelectron spectroscopy, we find that the content of Ge-C bonds first increases and then decreases as increasing bias while the Ge-O bond decreases monotonically.