Comparative study of properties betweena‐GeC:H anda‐SiC:H films prepared by radio‐frequency reactive sputtering in methane
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.359915
Reference14 articles.
1. Thin films of amorphous germanium-carbon and germanium-nitrogen alloys prepared by activated reactive evaporation
2. Structural, optical and electronic properties of amorphous SiC: H alloys prepared by magnetron sputtering of silicon in methane-argon gas mixtures
3. Effect of hydrocarbon gas on the properties of magnetron sputtering of amorphous SiC:H
4. Improvement of photoconductivity ofa‐SiC:H films by introducing nitrogen during magnetron sputtering process
5. Preparation ofa‐SiC:H/a‐GeC:H superlattices by dual magnetron sputtering
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