PL and DLTS Analysis of Carbon-Related Centers in Irradiated P-Type Cz-Si

Author:

Raeissi Bahman1,Ganagona Naveengoud1,Galeckas Augustinas1,Monakhov Edouard V.1,Svensson Bengt Gunnar1

Affiliation:

1. University of Oslo

Abstract

Photoluminescence (PL) and deep level transient spectroscopy (DLTS) have been used to investigate carbon related defects in p–type Cz–Si induced by proton irradiation. The interstitial carbon–interstitial oxygen (CiOi) level in DLTS and the corresponding C–line (789.5 meV) in PL spectra are detected in as–irradiated samples. Formations of the so–called P–line at 767 meV in PL and a new defect level at about 0.39 eV above the valence band edge, Ev, in the DLTS spectra are observed in the annealed samples. The evolution of the CiOiand Ev+0.39 eV levels in DLTS and also the C– and P– lines in PL upon post–irradiation heat–treatment is investigated, showing that the intensity of the CiOilevel decreases with heat–treatment, which is consistent with the PL data for the C–line. The intensity of the Ev+0.39 eV level is enhanced and then saturates with annealing duration. We tentatively assign this level to the interstitial carbon–oxygen dimer (CiO2i).

Publisher

Trans Tech Publications, Ltd.

Subject

Condensed Matter Physics,General Materials Science,Atomic and Molecular Physics, and Optics

Reference9 articles.

1. G. Davies and R.C. Newman, Carbon in Monocrystalline Silicon, in: Handbook on Semiconductors, Vol. 3, edited by S. Mahajan, North–Holland: Elsevier, Amsterdam, (1994).

2. L.C. Kimerling, M.T. Asom, J.L. Benton, P.J. Drevinsky, and C. E. Caefer, Mater. Sci. Forum 38–41(1989) 141–150.

3. B.G. Svensson, K. -H. Rydén, and B.M.S. Lewerentz, J. Appl. Phys. 66(1989) 1699–1704.

4. N. Ganagona, B. Raeissi, L. Vines, E.V. Monakhov, B.G. Svensson, Physica Status Solidi (C) 9(2012) 2009–(2012).

5. W. Kürnen, R. Sauer, A. Dörnen, and K. Thonke, Phys. Rev. B 39(1989) 13327–13337.

Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号  京ICP备18003416号-3