Nickel Gettering in Silicon: Role of Oxygen
Author:
Affiliation:
1. Université III d'Aix-Marseille
2. Aix Marseille Université
3. Centre National de la Recherche Scientifique
Publisher
Trans Tech Publications, Ltd.
Subject
Condensed Matter Physics,General Materials Science,Atomic and Molecular Physics, and Optics
Link
https://www.scientific.net/SSP.82-84.355.pdf
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Physical Chemistry of Semiconductor Materials Processing;Physical Chemistry of Semiconductor Materials and Processes;2015-08-07
2. Influence of metal trapping on the shape of cavities induced by high energy He+ implantation;Journal of Applied Physics;2006-02-15
3. Test Methods for Measuring Bulk Copper and Nickel in Heavily Doped p-Type Silicon Wafers;Journal of The Electrochemical Society;2006
4. Atomic spectrometry update. Industrial analysis: metals, chemicals and advanced materials;Journal of Analytical Atomic Spectrometry;2002-11-25
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