Test Methods for Measuring Bulk Copper and Nickel in Heavily Doped p-Type Silicon Wafers

Author:

Fabry Laszlo,Hoelzl Robert,Andrukhiv Andre,Matsumoto Kei,Qiu Joann,Koveshnikov Sergei,Goldstein Michael,Grabau Ann,Horie Hiroshi,Takeda Ryuji

Publisher

The Electrochemical Society

Subject

Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Reference88 articles.

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3. Back Side Damage Gettering of Cu Using a Cavitating Jet

4. Detection of Fast Diffusing Metal Impurities in Silicon by Haze Test and by Modulated Optical Reflectance: A Comparison

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