Flash Lamp Supported Deposition of 3C-SiC (FLASiC) – a Promising Technique to Produce High Quality Cubic SiC Layers-Reference-Cited by-同舟云学术

Flash Lamp Supported Deposition of 3C-SiC (FLASiC) – a Promising Technique to Produce High Quality Cubic SiC Layers

Published:2004-06 Issue: Volume:457-460 Page:175-180
ISSN:1662-9752
Container-title:Materials Science Forum
language:
Short-container-title:MSF

Author:

Skorupa Wolfgang¹,Panknin D.²,Anwand W.²,Voelskow M.³,Ferro Gabriel⁴,Monteil Yves⁵,Leycuras André⁶,Pezoldt Jörg⁷,McMahon R.A.,Smith M.⁸,Camassel Jean⁹,Stoemenos J.¹⁰,Polychroniadis Efstathios K.¹¹,Godignon Phillippe¹²,Mestres Narcis¹³,Turover Daniel,Rushworth S.¹⁴,Friedberger A.

Affiliation:

1. Helmholtz-Center Dresden-Rossendorf

2. Forschungszentrum Rossendorf

3. Forschungszentrum Dresden

4. Université de Lyon

5. Université Claude Bernard Lyon 1

6. Centre de Recherche sur l'Hétéroépitaxie et ses Applications (CRHEA), CNRS

7. Technische Universität Ilmenau

8. University of Cambridge

9. Université Montpellier 2

10. Aristotele University of Thessaloniki

11. Aristotle University of Thessaloniki

12. IMB-CNM, CSIC

13. Imperial College London

14. Epichem Ltd

Publisher

Trans Tech Publications, Ltd.

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Link

https://www.scientific.net/MSF.457-460.175.pdf

Reference6 articles.

1. D. Panknin, J. Stoemenos, M. Eickhoff, V. Heera, N. Vouroutzis, G. Krötz and W. Skorupa: Mat. Sci. Forum, Vol. 353-356 (2001) p.151.

2. Patents pending for the FLASiC and i-FLASiC processes.

3. H. Wirth, D. Panknin, W. Skorupa, and E. Niemann: Appl. Phys. Lett. Vol. 74 (1999), P. 979.

4. The reader is referred to the articles of Ferro et al., Polychroniadis et al., and Smith et al. to get a complete picture of the present state of the art of FLASiC.

5. T. Chassagne, G. Ferro, D. Chaussende, F. Cauwet, Y. Monteil and J. Bouix: Thin Solid Films Vol. 402 (2002), p.83.

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