Affiliation:
1. changchun university
2. Changchun University of Science and Technology
3. Qiqihr Railway Rolling Stock Co., Ltd.
Abstract
In the paper, it is introduced a new method of non-abrasive cryogenic polishing which is used to polish GaAs chips. It is also analyzed the influence of different factors on polishing surfaces and polishing uniformity. The rotate speed of work piece disk is a more important factor on impacting the polishing uniformity than offset e.
Publisher
Trans Tech Publications, Ltd.
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