Effects of surface chemical treatment on the formation of metal GaAs interfaces

Author:

Shoji Daisei,Shinohara Masanori,Miura Taka-aki,Niwano Michio,Miyamoto Nobuo

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Impact of chemical treatment on the surface, structure, optical and electrical properties of SnS thin films;Applied Surface Science;2013-03

2. Investigation of interfacial oxidation control using sacrificial metallic Al and La passivation layers on InGaAs;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2012-07

3. Research of GaAs Polishing Uniformity on Non-Abrasive Cryogenic Conditions;Advanced Materials Research;2011-07

4. The Experimental Research of the Non-Abrasive Cryogenic Polishing on GaAs Chip Surfaces;Advanced Materials Research;2010-10

5. Role of titanium in Ti/Ni ohmic contact on n-type 6H-SiC;Microelectronic Engineering;2010-03

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