Preparation and Properties of Pyrolytic Carbon Coating on Carbon Materials Used in Czochraski Single Crystal Silicon Furnace

Abstract

In this paper, resin and vapor deposition (CVD) pyrolytic carbon coating on carbon materials was designed based on the oxidation erosion and silicification corrosion mechanism. Meanwhile the phase structure, microstructure, anti-oxidation and anti-silicification corrosion mechanisms of both coatings were studied. The surface of resin pyrolytic carbon coating has a lot of defec comparing with CVD pyrolytic carbon coating. After static oxidation test at 900 °C, the resin pyrolytic carbon coating haves some antioxidant protection ability, but after 4 h of static oxidation, weight loss rate is still as high as 30%. Antioxidant effect of CVD pyrolytic carbon coating is good, 4 h oxidation weightlessness rate is about 10%. After silicification corrosion at 1600 °C, CVD pyrolytic carbon has excellent silicification protection ability.