Affiliation:
1. Southeast University
2. Zhejiang University of Technology
3. University of Arkansas
Abstract
Multilayer ceramics based on the low-temperature co-fired ceramics (LTCC) are gaining
increasing interests in the manufacturing of highly-integrated systems for microelectronic and
micro-system applications. The polishing experiments of sintered LTCC using a custom-built
precision polishing machine are reported in this paper. First, a micro-fluidic distributor was
fabricated using LTCC. Then, the polishing of this meso-MEMS system was studied using several
polishing parameters. By optimizing the polishing parameters, the surface roughness can be reduced
to 4 nm.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
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