Development and Modeling of a Macro/Micro Composite Positioning System for Microelectronics Manufacturing

Abstract

A macro-micro composite positioning stage with high acceleration and high precision is presented in this paper. A linear voice coil motor (VCM) is used to generate the macro motion, and a piezoelectric (PZT) actuator is adopted to drive the micro stage to achieve a precision micro motion, while PZT actuator can also be used to compensate the position error. A high-resolution grating is integrated into the stage to establish the closed-loop feedback. To research the mechanical dynamic characteristic of the stage, the mechanical dynamic model of the macro mechanism and micro mechanism are established, which is based on the rigid-flexible mixed dynamics of mechanical system. The dynamic characteristics of macro motion and micro motion are studied in detail, which is based on the mechanical dynamic simulation of Matlab. The accuracy of the established dynamic model and the performance of the stage are tested by using the scanning laser vibrometer. Both of the simulation results and test results show that the established model can well reflect the dynamic characteristics of the macro-micro composite positioning stage. It also indicates that the developed stage can well achieve a high acceleration and high precision motion, which aims to be applied in microelectronics manufacturing.