Design of a compact long-stroke high-precision rigid-flexible coupling motion stage driven by linear motor
Author:
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials
Link
https://link.springer.com/content/pdf/10.1007/s12206-022-1104-8.pdf
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1. Design and Analysis of a Long-Stroke and High-Precision Positioning System for Scanning Beam Interference Lithography;Electronics;2023-12-11
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