A Novel Flexure Deflection Device with Damping Function: Towards Laser Reflector of 3D Lithography
Author:
Publisher
Springer International Publishing
Link
http://link.springer.com/content/pdf/10.1007/978-3-030-27526-6_34
Reference11 articles.
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3. Divliansky, I.B., Weaver, G., Petrovich, M., et al.: CAD-integrated system for automated multi-photon three-dimensional micro-and nano-fabrication. In: MOEMS-MEMS Micro & Nanofabrication, pp. 196–203. International Society for Optics and Photonics (2005)
4. Sun, G.: Research on 3D micro-nano processing system based on femtosecond laser two-photon absorption. Jilin University (2012)
5. Zhang, L.Y., Gao, J., Tang, H.: Development and modeling of a macro/micro composite positioning system for microelectronics manufacturing. Key Eng. Mater. 679, 135–142 (2016)
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