Novel Cap Annealing Process for SiC Crystal Using ECR-Sputtered Carbon Films and ECR Plasma Ashing
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Published:2010-04
Issue:
Volume:645-648
Page:725-728
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ISSN:1662-9752
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Container-title:Materials Science Forum
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language:
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Short-container-title:MSF
Author:
Hirono Shigeru1,
Torii Hironori1,
Tajima Tetsuya1,
Amazawa Takao1,
Umemura Shigeru2,
Kamata Tomoyuki2,
Hirabayashi Yasuo3
Affiliation:
1. MES-Afty
2. Chiba Institute of Technology
3. Kanagawa Prefectrual Industrial Technology Center
Abstract
A high dose impurity doping process for 4H-SiC crystals has been developed using electron cyclotron resonance (ECR) sputtered carbon cap film and ECR plasma ashing. ECR-sputtered carbon films are newly found crystalline carbon films of which the hardness is comparable to that of diamonds. Since this carbon film showed such a high thermal tolerance that the hardness did not change after 1900oC annealing, this carbon cap film worked well for suppressing roughening during annealing for aluminum-ion implanted 4H-SiC. Cap carbon film can be removed successfully by using high density ECR plasma ashing.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Cited by
3 articles.
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