Doping Concentration and Surface Morphology of 4H-SiC C-Face Epitaxial Growth

Abstract

This research is focused on the influence of high C/Si ratios and low pressure on n-type doping concentration and surface defects of 4H-SiC C-face epilayers. N-type doping concentration decreases as C/Si ratio increases from 3.0 to 4.0 and pressure reduces from 100 mbar to 50 mbar; defect densities decrease as pressure increases at both C/Si ratios of 3.0 and 4.0. RMS roughness is about 0.21 nm for all C-face samples, independent of C/Si ratios of 3.0 and 4.0 and pressure from 50 mbar to 100 mbar. However, the influence of growth temperature on doping concentration and surface defects can not be clearly observed in this work.