Intelligent Fuzzy Ziegler-Nichols-Based Controller Design of a SPM System with Parameters Variation

Abstract

This research applied a stylus probe without balance and lever arm as in the previous design of a contact-force-controlled Scanning Probe Microscope (SPM) system. The controller integrated both Ziegler-Nichols-based and intelligent fuzzy methods; thus the systems relative stability can be reserved under the nominal conditions. In addition, one can see that both hysteresis and parameter variation effects of the force actuator can be reduced. Comparing the results with the traditional Ziegler-Nichols-based controller by simulation, one can see that the proposed systems are much more robust.