NF3 Added Oxidation of 4H-SiC(0001) and Suppression of Interface Degradation

Abstract

The electrical properties of SiO2/4H-SiC(0001) was characterized, and it was confirmed that the NF3 added oxidation in O2 can achieve interface with low interface state density. Optimization of NF3 added oxidation process was attempted to obtain films with both good interface properties and low leakage current. It was concluded that optimization of oxidation process should take account of obtaining proper balance among the rate of oxidation, which generates impurity carbon, the ability of carbon removal, and the rate of SiO2 etching which also affects the leakage characteristics.