Monte Carlo Study of the Hetero-Polytypical Growth of Cubic on Hexagonal Silicon Carbide Polytypes-Reference-Cited by-同舟云学术

Monte Carlo Study of the Hetero-Polytypical Growth of Cubic on Hexagonal Silicon Carbide Polytypes

Published:2013-01 Issue: Volume:740-742 Page:295-300
ISSN:1662-9752
Container-title:Materials Science Forum
language:
Short-container-title:MSF

Author:

Camarda Massimo¹,La Magna Antonino¹,La Via Francesco¹

Affiliation:

1. Istituto per la Microelettronica e Microsistemi IMM-CNR

Abstract

We use three dimensional kinetic Monte Carlo simulations on super-lattices to study the hetero-polytypical growth of cubic silicon carbide polytype (3C-SiC) on misoriented hexagonal (4H and 6H) substrates finding that the growth on misoriented (4°-10° degree off) 6H substrates, with step bunched surfaces, can strongly improve the quality of the cubic epitaxial film promoting 3C single domain growths

Publisher

Trans Tech Publications, Ltd.

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Link

https://www.scientific.net/MSF.740-742.295.pdf

Reference30 articles.

1. J.W. Sun, I.G. Ivanov, R. Liljedahl, R. Yakimova and M. Syväjärvi, Applied Physics Letters 100, 252101 (2012).

2. H. Nagasawa, M. Abe, K. Yagi, T. Kawahara, N. Hatta, Phys. Stat. Sol. (b) 245, 1272 (2008).

3. A. Severino, M. Camarda, S. Scalese, P. Fiorenza, S. Di Franco, C. Bongiorno, A. La Magna, and F. La Via Applied Physics Letters 95, 111905 (2009).

4. A. Severino, C. Bongiorno, N. Piluso, M. Italia, M. Camarda, M. Mauceri, G. Condorelli, M. A. Di Stefano, B. Cafra, A. La Magna, and F. La Via Thin Solid Films 518, S165 (2010).

5. A. Anzalone, G. D'arrigo, M. Camarda, C. Locke, S.E. Saddow, and F. La Via J. of Microelectromechanical Systems 20 745 (2011).

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Double-Position-Boundaries Free 3C-SiC Epitaxial Layers Grown on On-Axis 4H-SiC;ECS Journal of Solid State Science and Technology;2014