Fabrication of Metal Micro Needle Array by LIGA Process

Abstract

Polymer materials, such as PMMA and PDMS, have been of great interest in the research and development of MEMS recently due to their relatively low cost and easy process. In this research, we are trying to fabricate Ni Micro needle array from PMMA master by through PDMS mold based on multi-mold transformation technology. The fabricated micro nickel needles array is 900 microneedles in 1 cm2 chip area and the height of each needle is about 150um.