New Approach of Laser-SQUID Microscopy to LSI Failure Analysis-Reference-Cited by-同舟云学术

New Approach of Laser-SQUID Microscopy to LSI Failure Analysis

Published:2009 Issue:3 Volume:E92-C Page:327-333
ISSN:0916-8524
Container-title:IEICE Transactions on Electronics
language:en
Short-container-title:IEICE Trans. Electron.

Author:

NIKAWA Kiyoshi¹,INOUE Shouji²,NAGAISHI Tatsuoki³,MATSUMOTO Toru⁴,MIURA Katsuyoshi⁵,NAKAMAE Koji⁵

Affiliation:

1. Test and Analysis Engineering Division, NEC Electronics Corporation

2. Semiconductor Division, TDI Co Ltd.

3. Equipment Development Division, Sumitomo Electric System Solutions

4. Systems Division, Hamamatsu Photonics K.K.

5. Department of Information Systems Engineering, Graduate School of Information Science and Technology, Osaka University

Publisher

Institute of Electronics, Information and Communications Engineers (IEICE)

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

Link

http://www.jstage.jst.go.jp/article/transele/E92.C/3/E92.C_3_327/_pdf

Reference10 articles.

1. Magnetic detection of photogenerated currents in semiconductor wafers using superconducting quantum interference devices

2. [2] K. Nikawa, “Laser-SQUID microscopy as a novel tool for inspection, monitoring and analysis of LSI-chip-defects, ” IEICE Trans. Electron., vol.E85-C, no.3, pp.746-751, March 2002.

3. [3] K. Nikawa, “6 Laser-SQUID microscope for LSI chip defect analysis, ” in Applications of HTCS SQUIDs, in Voltex Electronics and SQUIDs, ed. T. Kobayashi, H. Hayakawa, and M. Tonouchi, pp.224-233, Springer, 2004.

4. [4] K. Nikawa, “3.2 scanning laser-SQUID for IC testing, ” in M. Tonouchi, A. Fujimaki, K. Tanabe, K. Enpuku, K. Nikawa, and T. Kobayshi, “Recent topics in high-Tc Superconductive Electronics, ” Jpn. J. Appl. Phys., vol.44, no.11, pp.7740-7742, 2005.

5. [5] K. Nikawa and S. Sakai, “Newly-developed scanning laser-SQUID microscope, ” Proc. 31 Int'l Sympo. Testing and Failure Analysis, pp.14-20, USA, Nov. 2005.

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