The combinational or selective usage of the laser SQUID microscope, the non-bias laser terahertz emission microscope, and fault simulations in non-electrical-contact fault localization-Reference-Cited by-同舟云学术

The combinational or selective usage of the laser SQUID microscope, the non-bias laser terahertz emission microscope, and fault simulations in non-electrical-contact fault localization

Published:2011-09 Issue:9-11 Volume:51 Page:1624-1631
ISSN:0026-2714
Container-title:Microelectronics Reliability
language:en
Short-container-title:Microelectronics Reliability

Author:

Nikawa Kiyoshi,Yamashita Masatsugu,Matsumoto Toru,Miura Katsuyoshi,Midoh Yoshihiro,Nakamae Koji

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Safety, Risk, Reliability and Quality,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference13 articles.

1. Laser-SQUID microscopy as a novel tool for inspection, monitoring and analysis of LSI-chip-defects;Nikawa;IEICE Trans Electron,2002

2. Nikawa K, Sakai S. Newly-developed scanning laser-SQUID microscope. In: Int’l sympo testing and failure analysis, USA; 2005. p. 14–20.

3. Sakai S, Nikawa K, Miura K, Nakamae K. Localizing-position accuracy improvement using higher-frequency laser-modulation in scanning-laser-SQUID microscopy. In: LSI testing sympo, Osaka, Japan; 2006. p. 305–10.

4. New approach of laser-SQUID microscopy to LSI failure analysis;Nikawa;IEICE Trans Electron,2009

5. Noncontact inspection technique for electrical failures in semiconductor devices using a laser terahertz emission microscope;Yamashita;Appl Phys Lett,2008

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1. Observation of impurity diffusion defect in IGBT using a laser terahertz emission microscope technique;Microelectronics Reliability;2013-09