Laser THz emission microscope as a novel tool for LSI failure analysis-Reference-Cited by-同舟云学术

Laser THz emission microscope as a novel tool for LSI failure analysis

Published:2009-09 Issue:9-11 Volume:49 Page:1116-1126
ISSN:0026-2714
Container-title:Microelectronics Reliability
language:en
Short-container-title:Microelectronics Reliability

Author:

Yamashita Masatsugu,Otani Chiko,Kim Sunmi,Murakami Hironaru,Tonouchi Masayoshi,Matsumoto Toru,Midoh Yoshihiro,Miura Katsuyoshi,Nakamae Koji,Nikawa Kiyoshi

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Safety, Risk, Reliability and Quality,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference35 articles.

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5. Terahertz beams;Fattinger;Appl Phys Lett,1989

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