Investigation of Surface Layer Formation for Fluorinated Carbon Film Using Fourier Transform Infrared Spectrometry Analysis-Reference-Cited by-同舟云学术

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Investigation of Surface Layer Formation for Fluorinated Carbon Film Using Fourier Transform Infrared Spectrometry Analysis

Published:2008-08-08 Issue:8 Volume:47 Page:6422-6426
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Seong Mi-Ryn,Lee Gye-Young,Cho Si-Hyeong,Lim Hyun-Woo,Park Jin-Goo,Lee Caroline Sunyong

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Reference12 articles.

1. Plasma polymer films and their future prospects

2. Chemical, optical and tribological characterization of perfluoropolymer films as an anti-stiction layer in micro-mirror arrays

3. Electron collisions with octafluorocyclobutane, c-C4F8

4. Production and wetting properties of fluorinated diamond-like carbon coatings

5. Plasma deposition of low-dielectric-constant fluorinated amorphous carbon

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Optimal Pressure and Temperature Conditions for Deposition of FOTS Thin Films Suitable for Anti-Stiction Layers;Korean Journal of Metals and Materials;2013-04-05

2. Control of Superhydrophilicity/Superhydrophobicity using Silicon Nanowires via Electroless Etching Method and Fluorine Carbon Coatings;Langmuir;2011-07-20

3. Effect of O₂ Pretreatment on Fluorinated Carbon Film Surfaces;MATERIALS TRANSACTIONS;2009

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